Abstract:Using the complex image method (CIM), we have analyzed the frequency and temperature dependencies of substrate eddy currents for single-ended and differential spiral inductors on a lossy silicon substrate. From our analysis, we have derived a set of accurate closed-form expressions for calculating inductances and substrate losses due to substrate eddy currents. Here, we propose a frequency-dependent eleven-element equivalent circuit model based on these formulas. We established the validity of the model by comparing the simulated and measured results, which are in good agreement. Index Terms—Complex image method (CIM), differential inductor, eddy currents, greenhouse algorithm, inductor model. HE high operating frequencies, at which deep submicrom- eter and nano-scale CMOS devices are able to operate, have brought radio-frequency integrated circuits (RFICs) in the realm of CMOS making the quality factor of the on-chip spiral inductors a focus of intense research. The quality factor of the on-chip inductor is limited by the losses due to the finite conduc- tivity of the metal and the conducting silicon substrate. Non-per- fect metal wires used to form spiral inductors cause ohmic loss due to the non-zero resistance at low frequencies. Additionally the non-uniform current distribution in metal wires at high fre- quencies increases the losses and degrades the quality factor of inductors. This loss mechanism has been extensively studied as skin- and proximity-effect (1)-(12).

CMOS-Compatible Micromachined Edge-Suspended Spiral Inductors With High Q-Factors and Self-Resonance Frequencies

High-Q CMOS-compatible micromachined edge-suspended spiral inductors

High-Performance Edge-Suspended Spiral Inductors And Cpws On Cmos-Grade Silicon Substrates

Modelling On-Chip Circular Double-Spiral Stacked Inductors for RFICs

CMOS-compatible micromachining techniques for fabricating high-performance edge-suspended RF/microwave passive components on silicon substrates

High Q-factor CMOS-MEMS inductor

A Compact Circuit Model of On-Chip Multi-layer Spiral Inductors on Silicon Substrate

Model Description and Parameter Extraction of On-Chip Spiral Inductors for MMICs

Analysis of Frequency- and Temperature-Dependent Substrate Eddy Currents in On-Chip Spiral Inductors Using the Complex Image Method

Vertical Topologies of Miniature Multispiral Stacked Inductors

A Novel Compact Model for On-Chip Vertically-Coiled Spiral Inductors

Experimental Characterisation Of On-Chip Octagonal Double-Helix Inductors On Silicon Substrates

On-chip Vertical Tapered Solenoid Inductor with High Self-Resonance Frequency

A derived circuit model for spiral inductors on lossy silicon substrate

Double-level Spiral Inductors with Multiple-Via Interconnects on GaAs Substrates

Implementation of New CMOS Differential Stacked Spiral Inductor for VCO Design

Design and Fabrication of the Suspended High-Q Spiral Inductors with X-Beams

Accurate Model for Micromachined Microwave Planar Spiral Inductors

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Novel On-Chip Spiral Inductors with Back Hollow Structure

High-Q Integrated Inductor Using Post-Cmos Selectively Grown Porous Silicon (sgps) Technique for Rfic Applications