Structure and Dielectric Performance of K-doped (pb0.5ba0.5)zro3 Thin Films

Xihong Hao,Jiwei Zhai,Zhenxing Yue,Jing Zhou,Xiwen Song,Jichun Yang,Shengli An
DOI: https://doi.org/10.1016/j.materresbull.2010.12.005
IF: 5.6
2010-01-01
Materials Research Bulletin
Abstract:In the present investigation (Pb0.5Ba0.5)ZrO3 (PBZ) thin films doped by K (KPBZ) from 0 to 5mol% were successfully deposited on Pt-buffered silicon substrates by a sol–gel method. The K content dependence of microstructure and electrical properties of KPBZ thin films were studied in detail. It was found that, although all the films displayed a pure perovskite structure without obvious difference, the surface roughness of KPBZ films was decreased with increasing K content. Dielectric measurements showed that the figure of merit (FOM) values of KPBZ thin films were greatly increased by K-doping, and at the same time that the temperature-dependent stability was also improved. Thus, K doping is a promising way to optimize the overall electrical properties of PBZ thin films for potential application in tunable devices.
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