Review and Prospects of Femtosecond Laser Micro-Processing Technology

HUANG You-xiang,ZHANG Qing-mao,LIAO Jian-hong,ZHOU Yong-heng
DOI: https://doi.org/10.13251/j.issn.0254-6051.2008.06.034
2008-01-01
Abstract:The recent progress of femtosecond laser micro-processing was reviewed,and the applications of femtosecond laser micro-processing were introduced in some areas including optics,micro-electronics,biomedicine and so on.Furthermore,the development trends of femtosecond laser micro-processing and some key techniques which demand to be solved were prospected.
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