Abstract:Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.

Study of Nanosecond Pulse Laser Micro-Fabrication

Realization of Nanosecond Pulse Laser Micromachining System

Ultraviolet nanosecond pulse laser 3D micro-fabrication system

Design and Implement of Nanosecond Laser Micromachining System

Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Femtosecond Laser Microchannels Fabrication Based on Electrons Dynamics Control Using Temporally or Spatially Shaped Pulses

Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model

Micro-Fabrication By Femtosecond Laser Pulses

Femtosecond laser irradiation for functional micro-/nanostructure fabrication

Nano-Structures Fabrication by Laser Combined with Near-Field Scanning Optical Microscopy

355Nm DPSS UV Laser Micromachining of Single-Crystal Silicon

Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption

Microfabrication by Femtosecond Laser Irradiation

Microfabrication of Optical Elements with Femtosecond Ti: Sapphire Laser Oscillator

Femtosecond laser workstation and micro-scale machining

The Fabrication of Micro/Nano Structures by Laser Machining

Microfabrication of Optical Elements with Femtosecond Ti:sapphire Laser Oscillator

Femtosecond Laser Double Pulses Nanofabrication on Silicon

Experimental study on direct fabrication of micro channel on fused silica by picosecond laser

Deposition and Melting Behaviors for Formation of Micro/nano Structures from Nanostructures with Femtosecond Pulses