Fresnel diffraction lithography
Zhong-Jun Jiang,Wei He,Jing-Wei Chen,Dan-Yang Luo,Fan Yang,Kai Jiang,Liang Wang,Department of Optics and Optical Engineering, School of Physics Sciences, University of Science and Technology of China, Hefei 230026, China
DOI: https://doi.org/10.7498/aps.72.20221533
IF: 0.906
2023-01-10
Acta Physica Sinica
Abstract:Author(s): Jiang Zhong-Jun, He Wei, Chen Jing-Wei, Luo Dan-Yang, Yang Fan, Jiang Kai, Wang Liang Lithography plays a vital important role in modern information technologies. Patterning on a nanoscale in a handy way is highly desired for both scientific and industrial purposes. In this work, we propose a convenient nanolithography method based on Fresnel diffraction patterns. We start with the explanation of the "dense-inside-sparse-outside" Fresnel diffraction fringes resulting from the apertures of finite extent, by using the fast Fourier transform algorithm through appropriately choosing the number of uniformly spaced samples. Moderately focusing the diffraction patterns via high-numerical-aperture objectives ( the method is termed the "Fresnel diffraction lithography"), the rotationally symmetric patterns with a minimum feature size of ~190 nm, and the scanning lines with a width of ~350 nm are realized, respectively, The calculation using vectorial diffraction theory suggests a better resolution when perfectly focused. This method shows good tolerance to defocus and does not require complex lens combinations or micro/nano-diffraction optical elements, Therefore, this method can find some applications in widespread areas, e.g. functional metasurfaces, as a novel and low-cost nano-patterning technology with sub-wavelength resolution and high flexibility. Acta Physica Sinica. 2023 72(1): 014202. Published 2023-01-05
physics, multidisciplinary