Abstract:Carbon nitride films were deposited on Co/Ni-covered Si(100) wafers at room temperature using a dc glow discharge plasma beam deposition method. The glow discharge has been carried out in a mixed gas of nitrogen and methane in different relative proportions and has maintained stable in an glow operating pressure around 30Torr. Scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy and Raman spectroscopy were carried out to investigate morphology, composition, structure and crystallinity of the as-deposited films. In scanning electron microscopy images, the as-deposited films consist of crystallites with an average size of about 20–30nm, and an interesting cauliflower structure is found in the center of a prepared sample. The X-ray diffraction results indicate that β- and graphitic-C3N4 crystallites and CNx or carbon nanotubes exist in the as-deposited films. The X-ray photoelectron spectroscopy results show that the [N]/[C] ratios are 0.34–0.46 and the peak shapes and intensities in the N 1s and C 1s regions are similar to those previously reported by our research group using the atom-beam assisted pulsed laser deposition method. The Raman spectra show two separated characteristic bands: a disordered D band (around 1323cm−1) that indicates the presence of C3N4 components, and a graphitic G band (around 1593cm−1). The impacts of the substrate temperatures, nitrogen/methane pressure ratios and Co/Ni layer thicknesses on the properties of the as-deposited films are discussed.

Synthesis of nanocrystalline CrN by arc discharge

Synthesis of Stoichiometric and Bulk CrN Through a Solid-State Ion-Exchange Reaction.

Synthesis of Nanocrystalline Carbon Nitride Films by Glow Discharge Plasma Beam Deposition

Synthesis of C3N4+ by the Combination of Laser Ablation of Graphite and N2 Molecular Beam

Crystalline Carbon Nitride Film Synthesized by Ion Beam Assisted Magnetron Sputtering and Thermal Annealing in Nitrogen Gas

Controlled Synthesis of Novel Chromium Nitride Dendritic and Bundle-Like Nanocrystals Via Solvent-Free Route at Low Temperature

Investigation of carbon nitride films by cathodic arc evaporation

High-Temperature High-Pressure Synchrotron X-Ray Diffraction Study Of C3n4

Understanding the lattice nitrogen stability and deactivation pathways of cubic CrN nanoparticles in the electrochemical nitrogen reduction reaction

Synthesis of Aluminum Nitride Nanocrystals and Platelets

Synthesis of Carbon Nitride Nanocrystals on Co/Ni-covered Substrate by Nitrogen-Atom-beam-assisted Pulsed Laser Ablation

Synthesis of Carbon Nitride Films by Arc-Heated Atomic Nitrogen Beams Assisted Pulsed Laser Ablation

Raman Spectra Of Nanocrystalline Carbon Nitride Synthesized On Cobalt-Covered Substrate By Nitrogen-Atom-Beam-Assisted Pulsed Laser Ablation

Deposition of crystalline C3N4 films via microwave plasma chemical vapour deposition

Synthesis of Crystalline Carbon Nitride Nanocone Arrays by Direct‐Current Discharge Plasma‐Assisted CVD

Thermodynamic Studies of the Fe-Cr-C-N System by Emf Measurements

Synthesis of Crystalline Carbon Nitride by Microwave Plasma Chemical Vapor Deposition

Growth of Spontaneous Nucleation AlN Crystals by Al-Base Alloy Evaporation in Nitrogen Atmosphere

Growth of Ni/Co-catalyzed crystalline CNx thin films by nitrogen-plasma-assisted pulsed laser deposition

Spectroscopic Study on Pulsed Laser Ablation of Graphite Target in Ecr Nitrogen Plasma for Carbon Nitride Film Deposition

Crystalline Carbon Nitride Films Prepared by Microwave Plasma Chemical Vapour Deposition