Fabrication Of Stacked Intrinsic Josephson Junctions From Bi2sr2cacu2o8+X Thin Films

Y G Xiao,Regina Dömel,C L Jia,C Osthöver,H Kohlstedt

DOI: https://doi.org/10.1088/0953-2048/9/4A/007

1996-01-01

Abstract:Stacked series arrays of intrinsic Josephson junctions were fabricated from Bi2Sr2CaCu2O8+x thin films, deposited by high-oxygen-pressure de sputtering. Stacks with areas between 2 x 2 mu m(2) and 50 x 50 mu m(2), and thicknesses of 80-200 nm, were fabricated by photolithography and ion beam etching. We obtained RCSJ-like I-V curves with a critical current density of about 2 x 10(4) A cm(-2) at 4.2 K. At high bias currents, we observed in some I-V curves many branches with gaps of about 10 mV corresponding to individual junctions. In addition, synchronized switching of more than 10 junctions was observed.