Study on High Flatness Processing of Paper-thin Silver Electrode

Xun LV,Yang-fy JIN,Cong-da LU
DOI: https://doi.org/10.3969/j.issn.1005-2895.2007.01.035
2007-01-01
Abstract:The silver electrode of piezoelectric ceramic transducer requires high flatness and surface quality,but it is extremely thin(50~60μm).The mechanical allowance is very little,and the silver electrode is easily worn out in traditional ultra-precise machining.Because the removal rate of polishing is small,the new processing uses the polishing process directly.In order to improve the surface flatness of the silver electrode,the high flatness tin polisher is adopted.The main influencing factors,including the concentration of slurry,machining pressure and machining speed on the flatness,surface quality and removing stock were tested and discussed in several groups of contrastive experiments,and the best technique is obtained.
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