Interplay Between Elastic Interactions and Kinetic Processes in Stepped Si (001) Homoepitaxy

Wei Hong,Zhenyu Zhang,Zhigang Suo
DOI: https://doi.org/10.1103/physrevb.74.235318
IF: 3.7
2006-01-01
Physical Review B
Abstract:A vicinal Si (001) surface may form stripes of terraces, separated by monatomic-layer-high steps of two kinds, S-A and S-B. As adatoms diffuse on the terraces and attach to or detach from the steps, the steps move. In equilibrium, the steps are equally spaced due to elastic interaction. During deposition, however, S-A is less mobile than S-B. We model the interplay between the elastic and kinetic effects that drives step motion, and show that during homoepitaxy all the steps may move in a steady state, such that alternating terraces have time-independent, but unequal, widths. The ratio between the widths of neighboring terraces is tunable by the deposition flux and substrate temperature. We study the stability of the steady-state mode of growth using both linear perturbation analysis and numerical simulations. We elucidate the delicate roles played by the standard Ehrlich-Schwoebel (ES) barriers and inverse ES barriers in influencing growth stability in the complex system containing (S-A+S-B) step pairs.
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