Laser Cleaning of Surface Contaminants

AC Tam,HK Park,CP Grigoropoulos
DOI: https://doi.org/10.1016/s0169-4332(97)00788-5
1997-01-01
Abstract:Laser cleaning effect can be produced on a surface using pulsed laser irradiation, with pulse duration typically 1 to 100 ns, fluence typically tens to hundreds of mJ/cm2, and wavelengths typically in the 200 to 300 nm range. A thin liquid film can be used to enhance the removal efficiency of small particulates; this is called `steam laser cleaning'. A manufacturing-worthy tool that can provide both steam laser cleaning as well as dry laser cleaning is built and tested successfully. The basic mechanism of steam laser cleaning is studied.
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