Multiple Conduction Behavior of BaRuO 3 Thin Film Prepared by Pulsed Laser Ablation Deposition

M Gu,WP Xu,LR Zheng,CL Lin,ZC Cao
DOI: https://doi.org/10.1016/s0040-6090(96)08802-5
IF: 2.1
1996-01-01
Thin Solid Films
Abstract:In this paper, thin films of BaRuO3 prepared on a Si substrate by the pulsed laser ablation deposition method under oxygen ambient have been studied by means of X-ray diffraction, emission spectroscopy, Rutherford backscattering spectroscopy, RT Hall measurement and resistivity measurement. It is interesting to find that BaRuO3 thin films, having a different thermal history examined in the same temperature range, show different conduction types including metallicity, semiconduction and semiconductor-metal transition. The explanation about the findings are given using a suggested modified energy band diagram. It is believed that the versatile electrical behavior is helpful for the use in electrical contact materials.
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