High-conductivity BaRuO3 thin film and its preparation by pulsed laser deposition

Huaping Xu,Huoping Xin,Lirong Zheng,Chenglu Lin
1996-01-01
Abstract:Ruthenate is a typical complex transition metal oxide of ABO3 type, which possesses metallic conductivity. Its film can be used as electrode material in integrated ferroelectric devices, etc. In this paper, the Perovskitic structure and conducting mechanism of BaRuO3 were analyzed. Perovskite BaRuO3 thin films of low resistivity with ��110�� orientation have been successfully prepared on Si ��100�� substrate by ArF a excimer pulsed laser deposition (PLD) accompanied with subsequent annealing. Both Auger electron spectroscopy (AES) and Rutherford backscattering spectroscopy (RBS) showed that the film was pure and with good compositional homogeneity while there formed an intermediate diffusion layer between BaRuO3 and Si-substrate.
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