Progress of study on AFM tip wear mechanism

Yan Yong-da,Yin Da-yong,Fei Wei-dong
2008-01-01
Abstract:Based on analysis of effects of worn AFM tip on the experimental results in the applications of measurement and fabrication by using Atomic Force Microscope(AFM), the wear mechanism of Si3N4 tip, diamond tip and silicon tip are summarized. Furthermore, prospect is also provided concerning future work in the study of AFM tip wear.
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