Abstract:Probe is a key part of atomic force microscopy (AFM) and the curvature radius of its tip limits the lateral resolution. Furthermore, as an expendable, its life has a direct effect on operation cost. Single-walled carbon nanotubes (SWNTs) are ideal materials for the probe tips used in atomic force microscopy (AFM), since they have intrinsically small diameters, high aspect ratios and unique wearability. Herein, the fabrication of AFM SWNT tips is systemically investigated, including mechanical method and direct growth method. In the former, substrates with isolated SWNTs are first prepared by chemical vapor deposition and then scanned with conventional silicon probes under AFM. During scanning, SWNTs can be picked up from substrates and attached to the pyramid of silicon probes via attractive Van del Waals forces. Preparation of substrates is decisive to this method, since only the SWNTs disengaged from surface are possible to pick up. Different substrates have been compared and the results show that the substrates full of gaps are prior to the planar ones. SWNTs are suspended across gaps and suitable to the following assembly. The mechanical method is easily implemented and can produce AFM SWNT tips one by one, while the direct growth method is promising to manufacture them in a large scale, in spite of more difficulty. In the latter, catalyst for the growth of SWNTs is directly placed on individual commercial probes or pyramid arrays. Through chemical vapor deposition, grown SWNTs protrude from the original tips and create new ones. Due to the random orientation of SWNT growth, the yield of successful SWNT tips is generally low for the direct growth method. In this article, Electric filed is used to direct the growth orientation of SWNTs during chemical vapor deposition. Both electrodes are located in the furnace to apply a static electric field along the pyramid axis during growth. The intensity can be varied from 0.1V/um to IV/um, and the direction is towards the surface of wafers. The growth of SWNTs is oriented by electric field and the yield of SWNT tips is raised. The AFM SWNT tips derived from the above two methods have been utilized to image Au layers in the tapping mode. Compared with conventional silicon probes, SWNT tips are longer lasting to keep a high resolution.

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Fabrication of AFM Single-Walled Carbon Nanotube Tips

Carbon Nanotubes As Tips for Atomic Force Microscopy

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AFM Tip-Based Fabrication of Silicon Nanostructures with Reduced Subsurface Amorphous Layers

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Atomic Force Microscope Tip Cleaning by Using Gratings As Micro‐washboards

Study on the fabrication methods of carbon nanotube probe

Wear-Resistance Comparison of Carbon Nanotubes and Conventional Silicon-Probes for Atomic Force Microscopy

Optimization Of The Tip Of Microwave Afm Probe

Fabrication of Cantilever with Self-Sharpening Nano-Silicon-tip for AFM Applications

Property of Carbon Nanotube Tip for Surface Topography Characterization

Experimental Investigation of Tip Wear of AFM Monocrystalline Silicon Probes

Structural and functional imaging with carbon nanotube AFM probes

Fabrication of AFM Probe with CuO Nanowire Formed by Stress-Induced Method

Controlled Growth of a Single Carbon Nanotube on an AFM Probe

Carbon Nanotube As Probe for Atomic Force Microscope

Investigation of the Interaction Between Carbon Nanotube Tip and Silicon Sample Through Molecular Dynamic Simulation

Quantitative wear evaluation of tips based on sharp structures

Atomic Force Microscope Using a Diamond Tip: a Tool for Micro/nanomachining on Single-Crystal Silicon Surface

Assembly of Carbon Nanotube Onto Scanning Tunneling Microscope Tips