Diamond Synthesized at Room Temperature by Pulsed Laser Deposition in Vacuum

DK Mishra,XM Tian,T Soga,T Jimbo,M Sharon
DOI: https://doi.org/10.1143/jjap.42.l1164
2003-01-01
Abstract:Here we show that diamond particles were formed on (100) silicon substrates by XeCl (308 nm, 20 ns) laser ablation using a urea doped camphoric carbon target in vacuum. The substrate temperature and the pressure were kept At room temperature (25degreesC) and (4-5) x 10(-5) Tort, respectively without feeding any gases during the deposition. Raman spectroscopy analysis confirmed the diamond cubic structure of the crystals by the presence of a sharp peak at 1337.8 cm(-1). One broad peak is also observed in the spectra centered at 1550 cm(-1), which is attributed to the G-peak in the film.
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