Abstract:Aluminosilicate (Al-Si-O) thin films containing up to 31 at. % Al and 23 at. % Si were prepared by reactive RF magnetron co-sputtering. Mechanical and structural properties were measured by indentation and specular reflectance infrared spectroscopy at varying Si sputtering target power and substrate temperature in the range 100 to 500 °C. It was found that an increased substrate temperature and Al/Si ratio give denser structure and consequently higher hardness (7.4 to 9.5 GPa) and reduced elastic modulus (85 to 93 GPa) while at the same time lower crack resistance (2.6 to 0.9 N). The intensity of the infrared Si-O-Si/Al asymmetric stretching vibrations shows a linear dependence with respect to Al concentration. The Al-O-Al vibrational band (at 1050 cm-1) shifts towards higher wavenumbers with increasing Al concentration which indicates a decrease of the bond length, evidencing denser structure and higher residual stress, which is supported by the increased hardness. The same Al-O-Al vibrational band (at 1050 cm-1) shifts towards lower wavenumber with increasing substrate temperature indicating an increase in the of the average coordination number of Al.

Influence of the Liquid Substrate Temperature on the Band-Shaped Ordered Structures in an Al Film System

Temperature dependence of ordered patterns in a free sustained Al film system

Expansion Effect of Liquid Substrates on the Ordered Structures in the Al Films

SURFACE MORPHOLOGY AND GROWTH MECHANISM OF THE Al FILMS DEPOSITED ON LIQUID SURFACES

Spontaneous Formation of Ordered Patterns in Al Films Deposited on Silicone Oil Surfaces

Growth Mechanism of Ordered Stress-Induced Patterns in Al Films Deposited on Silicone Oil Surfaces

Influence of Post-Annealing Treatment on the Morphology of Au Films Deposited on Liquid Surfaces

Novel Sandwich Structure for Aluminum Induced Crystallization of Amorphous Silicon Thin Films at Low Temperature

Temperature dependence of resistivity of random metallic film deposited on fractal substrate

Effect Of Substrate Temperature On The Surface Morphology And Interface Structure Of Ptsi/P-Si

PHYSICAL PROPERTIES OF WEDGE-SHAPED Al THIN FILM

The Effects of Substrate on the Properties of Sol-Gel Derived TiO2 Films

Ordered structures and self-organized phenomena in Au films deposited on silicone oil surfaces

Anomalous Hopping and Tunneling Effects in a New Aluminum Film Percolation System

Effect of substrate temperature on adhesion at liquid-aluminum/silica interface by phantom wall method

Temperature Dependence of the Aggregation Behavior of Aluminum Nanoparticles on Liquid Substrate

Growth and Morphology of Ultra-Thin Al Films on Liquid Substrates Studied by Atomic Force Microscopy

Temperature Dependence of Coercivity Behavior in Iron Films on Silicone Oil Surfaces

Effects of deposition temperature on the mechanical and structural properties of amorphous Al-Si-O thin films prepared by RF magnetron sputtering

The Orientation Dependence of Liquid Ordering at Α-Al2o3/al Solid–liquid Interfaces: A Molecular Dynamics Study

Pattern Formation under Residual Compressive Stress in Free Sustained Aluminum Films