Design and Fabrication of A Negative Microlens Array

Ying Huang,Ran Liu,Jianjun Lai,Xin-Jian Yi
DOI: https://doi.org/10.1016/j.optlastec.2008.02.007
2008-01-01
Abstract:An operation model of a negative microlens array is demonstrated. The array consists of two kinds of materials with different refractive indices. First of all, a positive microlens array with 256×256 elements serving as a pattern is fabricated by argon ion beam etching on the quartz. The diameter and average corona height of the element are 28 and 0.638μm, respectively. The spacing between two neighboring elements is 2μm. In the second phase, after being coated by epoxy, the positive microlens array pattern is spun and baked, leading to a complex negative microlens array. Surface stylus measurement shows that the surface of the positive quartz microlens array is smooth and uniform. Focal length measurement of the negative microlens array indicates that the focal length region with −731±3μm is in good agreement with the theoretical calculation value of −729μm.
What problem does this paper attempt to address?