Study on the Ohmic Contact for P-Type Diamond

LONG Run,DAI Ying,LIU Dong-hong,YU Lin,YAN Cui-xia
DOI: https://doi.org/10.3969/j.issn.1003-353x.2006.01.014
2006-01-01
Abstract:Ohmic contact of diamond is one of the key issues for semiconductor devices.The progresses on preparation of ohmic contact of p-type diamond are reviewed.Combining the develop-ments of device with demands of processing,the approaches to improve the ohmic contact character-ization are discussed,and the problems remained to be solved are pointed out.
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