Abstract:Amorphous carbon (a-C), one of the most studied carbon-based films, has been widely applied in the filed of artificial joints due to its excellent mechanical and tribological properties and high corrosion resistance. However, low adhesive strength and poor fatigue resistance are fatal shortcomings of this kind of films. In this study, carbon (sp2-C:Ti/sp3-C:Ti) nano-multilayer films (MFs) with sequential sp3-rich and sp2-rich layers were deposited on Ti6Al4V and c-Si substrate by DC magnetron sputtering. X-ray diffraction, scanning electron microscopy, the X-ray photoelectron spectroscopy and the transmission electron microscopy were used to characterize the composition, structure and morphologies of the MFs. In the sp2-C:Ti/sp3-C:Ti MFs, the sp3-C rich layer and the sp2-C rich layer exhibit amorphous features and onion-like structure, respectively. Moreover, the layered structure is continuous in a relatively clear region but with a rough layer interface. The mechanical and the scratch behaviors were elaborately characterized by nanoindentation and scratch tests. The results revealed that the sp2-C:Ti/sp3-C:Ti MFs possess hardness of 21.9 GPa and excellent scratch behavior at sputtering bias voltage −220 V, which are significantly better than single-layer films. Furthermore, the adhesion and tribological behaviors of the sp2-C:Ti/sp3-C:Ti MFs were obtained by Rockwell and ball-on-disk tribometer tests. It was found that the sp2-C:Ti/sp3-C:Ti MFs synthesized under a sputtering bias of −220 V not only exhibit relatively low coefficient of friction (only 0.11) in humid air, but also present lower coefficient of friction (0.085) and wear rate (7.5 × 10−17m3N−1 m−1) of Si3N4 balls in Fetal bovine serum (FBS) solution. In conclusion, the critical loads and wear resistance of the sp2-C:Ti/sp3-C:Ti-MFs were effected by the sputtering bias and the mechanical properties of the MFs. And when sputtering bias is −220 V, the sp2-C:Ti/sp3-C:Ti MFs exhibited the improved mechanical properties, the lowest coefficient of friction (CoF) and the highest wear resistance.

Structure and Characteristics of Amorphous (ti,si)–c:H Films Deposited by Reactive Magnetron Sputtering

Properties of amorphous SiO2 films prepared by reactive RF magnetron sputtering method

Superlow Friction of Titanium/silicon Codoped Hydrogenated Amorphous Carbon Film in the Ambient Air

Structural and tribological behaviours of silicon doped amorphous carbon films

Tribology dependence on both structures of bulk a-C:H:Si films and transfer layer via adjustable Si content

Microstructure and Tribological Properties of Ti-contained Amorphous Carbon Film Deposited by DC Magnetron Sputtering

Origin of Superlubricity in A-C:H:si Films: A Relation to Film Bonding Structure and Environmental Molecular Characteristic

Achieving superlubricity and high adhesion strength of hydrogenated amorphous carbon film with Al/Cr/Si-doping

Revealing the Low-Temperature Friction Behavior and Mechanisms of Hydrogenated Amorphous Carbon Films with Al/Cr/Si Doping

Influence of Si on the Microstructure and Mechanical and Tribological Properties of Ag/a-C:H Films

Structure and Lubricated Tribological Behavior of Silicon Incorporated Carbon Nitride Composite Films Deposited by Magnetron Sputtering

The Electrochemical and Mechanical Properties of Ti Incorporated Amorphous Carbon Films in Hanks' Solution

Effect of a-C:H:Si interlayers on the mechanical and superlubricious properties of hydrogenated amorphous carbon films

The Effect of Relatively Low Hydrogen Dilution on the Properties of Carbon-Rich Hydrogenated Amorphous Silicon Carbide Films

Comparative Study of the Tribology of Amorphous Carbon Films Via Magnetron Sputtering Depending on the Different Magnetic Field

Structure, mechanical properties and tribological behavior of sp2-C:Ti/sp3-C:Ti multilayer films deposited by magnetron sputtering

The Influence of Radio Frequency Power on the Characteristics of Carbon-Rich Hydrogenated Amorphous Silicon Carbide Films

Influence of Tribofilm on Superlubricity of Highly-Hydrogenated Amorphous Carbon Films in Inert Gaseous Environments

Fullerene-like Nanostructure Induced Excellent Friction Behavior in High Vacuum Environment for Hydrogenated Carbon Film

Growth Mechanism and Composition of Ultrasmooth A-C:H:Si Films Grown from Energetic Ions for Superlubricity

Effects of Bias Voltage on Structure and Properties of Tial-Doped A-C:H Films Prepared by Magnetron Sputtering