Temperature And Frequency Dependence Of Dielectric Properties Of (Pb, La)(Zr, Sn, Ti)O-3 Antiferroelectric Thin Films On Lanio3 Bottom Electrode With Different Sheet Resistance

Xihong Hao,Jiwei Zhai,Qunping Jia,Bo Shen,Xi Yao
DOI: https://doi.org/10.1088/0022-3727/41/16/165403
2008-01-01
Abstract:Via the sol-gel process (Pb0.97La0.02)(Zr0.87Sn0.10Ti0.03)O-3 (PLZST 2/87/10/3) antiferroelectric thin films were deposited on a metalorganic decomposition derived LaNiO3 (LNO) bottom electrode. The phase structure and microstructure of LNO and PLZST 2/87/10/3 thin films were analysed by an x-ray diffractometer (XRD) and a scanning electron microscope (SEM). The effect of the LNO bottom electrode with various sheet resistances on the dielectric proper-ties of PLZST 2/87/10/3 anti ferroelectric thin films was investigated in detail as a function of frequency, temperature and dc electric field. A simple model was presented to explain the nature of LNO bottom electrode based capacitors.
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