Abstract:Zirconia (ZrO 2 ) thin films were deposited on silicon using a zirconium cathodic arc plasma source in the presence of oxygen following by thermal treatment at various temperatures. The structure and phase composition of the zirconia films were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The bone bioactivity of the as-deposited and heat-treated ZrO 2 films was evaluated by soaking them in simulated body fluids (SBF) for different time durations. The tetragonal phase predominates in the ZrO 2 film and its surface microstructures strongly depend on the processing conditions such as substrate temperature during deposition, sample bias, and annealing temperature. The particle size which increases with higher annealing temperature is smaller than 100 nm in spite of annealing at 1000C for 2 hours. Bone-like apatite was found to form on the surface of the as-deposited ZrO 2 film in our SBF immersion experiments, suggesting that the surface is bioactive. However, the bioactivity of the film deteriorated after thermal treatment suggesting that the bioactivity of the ZrO 2 films depends on the particle size in the near surface. The nano-structured surface is believed to be the key factor to induce apatite precipitation on the ZrO 2 film surface.

Enhancing the Bioactivity of Zirconium with the Coating of Anodized ZrO2 Nanotubular Arrays Prepared in Phosphate Containing Electrolyte

The characteristic and osteogenic effect of a nanoporous coating of zirconia implant

Zinc- and Strontium- Co-Incorporated Nanorods on Titanium Surfaces with Favorable Material Property, Osteogenesis, and Enhanced Antibacterial Activity.

Enhanced Bioactivity of Self-Organized Zro2 Nanotube Layer by Annealing and Uv Irradiation

Bioactive zirconia thin films fabricated by dual cathodic arc and oxygen plasma deposition

TiO2 Nanocoatings with Controllable Crystal Type and Nanoscale Topography on Zirconia Implants to Accelerate Bone Formation

Preparation of a Novel Transplant Material, Zirconium Oxide (ZrO₂) Nanotubes, and Characterizations Research

Surface modification of low-modulus Ti35NbXZr alloys with nanotube arrays

Fabrication of Highly Ordered Nanotube Layer on Zr-Based Bulk Metallic Glass for Biomedical Uses

Biomedical Zirconia Films Synthesized by Cathodic Arc Plasma Deposition

Interfacial Structure and Enhanced Adhesion Between Anodized ZrO2 Nanotube Films and Zr Substrates by Sedimentation of Fluoride Ions

Bioactivity and Cytocompatibility of Zirconia (zro2) Films Fabricated by Cathodic Arc Deposition

Dose-dependent Enhancement of Bioactivity by Surface ZnO Nanostructures on Acid-Etched Pure Titanium

Formation and Bioactivity of HA Nanorods on Micro-Arc Oxidized Zirconium

Fabrication Parameter-Dependent Morphologies of Self-Organized Zro2 Nanotubes During Anodization

Nanotubular ZrTiO 4 Prepared on Sputter Deposited Zr−Ti Films by Anodization

Osteo-angiogenic and Antibacterial Activity of a Multifunctional Micro-Porous Coating on Zirconium Alloy

Anodic TiO2 Nanotubular Arrays with Pre-Synthesized Hydroxyapatite--an Effective Approach to Enhance the Biocompatibility of Titanium.

Mesoporous Bioactive Glass Nanolayer‐Modified Zirconia Coatings on Ti‐6Al‐4V with Improved in Vitro Bioactivity

Synergistic Catecholamine and Coordination Chemistry for Enhanced Bioactivity and Secondary Grafting Activity of Zirconia Dental Implants

Two-step anodization fabrication of ordered ZrO2 nanotube arrays