Role of Fluoride Doping in Low-Temperature Combustion-Synthesized ZrO x Dielectric Films
Aritra Sil,Elise A. Goldfine,Wei Huang,Michael J. Bedzyk,Julia E. Medvedeva,Antonio Facchetti,Tobin J. Marks
DOI: https://doi.org/10.1021/acsami.1c22853
2022-03-02
Abstract:Zirconium oxide (ZrO<sub><i>x</i></sub>) is an attractive metal oxide dielectric material for low-voltage, optically transparent, and mechanically flexible electronic applications due to the high dielectric constant (κ ∼ 14-30), negligible visible light absorption, and, as a thin film, good mechanical flexibility. In this contribution, we explore the effect of fluoride doping on structure-property-function relationships in low-temperature solution-processed amorphous ZrO<sub><i>x</i></sub>. Fluoride-doped zirconium oxide (F:ZrO<sub><i>x</i></sub>) films with a fluoride content between 1.7 and 3.2 in atomic (at) % were synthesized by a combustion synthesis procedure. Irrespective of the fluoride content, grazing incidence X-ray diffraction, atomic-force microscopy, and UV-vis spectroscopy data indicate that all F:ZrO<sub><i>x</i></sub> films are amorphous, atomically smooth, and transparent in visible light. Impedance spectroscopy measurements reveal that unlike solution-processed fluoride-doped aluminum oxide (F:AlO<sub><i>x</i></sub>), fluoride doping minimally affects the frequency-dependent capacitance instability of solution-processed F:ZrO<sub><i>x</i></sub> films. This result can be rationalized by the relatively weak Zr-F versus Zr-O bonds and the large ionic radius of Zr<sup>+4</sup>, as corroborated by EXAFS analysis and MD simulations. Nevertheless, the performance of pentacene thin-film transistors (TFTs) with F:ZrO<sub><i>x</i></sub> gate dielectrics indicates that fluoride incorporation reduces <i>I</i>-<i>V</i> hysteresis in the transfer curves and enhances bias stress stability versus TFTs fabricated with analogous, but undoped ZrO<sub><i>x</i></sub> films as gate dielectrics, due to reduced trap density.
materials science, multidisciplinary,nanoscience & nanotechnology