Abstract:We developed a new platform that enables in-situ four-probe electronic measurements, in-situ three-probe field-effect measurements, nanomanipulation, and in-situ modification of nanodevices inside a transmission electron microscope (TEM). The platform includes a specially designed chip-holder and a silicon (Si) chip with suspended metal electrodes. The chip-holder can hold one Si chip with a size up to 3 mm x 3 mm and provides four electrical connections that can be connected to the micrometer-sized electrodes on the Si chip by wire-bonding. The other side of the electrical connections on the chip-holder is connected to the electronic instruments outside the TEM through a commercial Nanofactory SPM-TEM holder. The Si chip with suspended metal electrodes on one of its edges was fabricated by lithography and wet etching. Carbon nanotubes (CNTs), InAs nanowires, and tungsten disulfide nanowires were placed to stride over and connect to the suspended electrodes on the Si chip by nanomanipulations inside a scanning electron microscope (SEM). By using the platform, I-V curves of an individual single-walled CNT connecting to four electrodes were in-situ measured between any two of the four suspended electrodes, and a high-resolution TEM image of the same CNT was obtained. Furthermore, four-terminal I-V measurement on an InAs nanowire was achieved on this platform, and with a movable probe used as a gate electrode, field-effect measurement on the same InAs nanowire device was accomplished in SEM. In addition, by using the movable probe on the SPM-TEM holder, we could further in-situ modify nanomaterial and nanodevices. The present work demonstrates a method that allows a direct correlation between the atomic-level structure and the electronic property of nanomaterials or nanodevices whose structure can be further modified in-situ.

The design and fabrication of the in situ double-tilt sample holders for the transmission electron microscopy

Double-tilt in Situ TEM Holder with Ultra-High Stability

Developing Multifunctional and High Resolution In-situ TEM Holders

In Situ Cathodoluminescence and Monitoring Electronic Structure Change Using Optical TEM Holder

A Compact Design of Four-Degree-of-freedom Transmission Electron Microscope Holder for Quasi-Four-dimensional Characterization

Microfabricated double-tilt apparatus for transmission electron microscope imaging of atomic force microscope probe

Fabrication and Electric Measurements of Nanostructures Inside Transmission Electron Microscope

Atomic-scale observation of the deformation and failure of diamonds by in-situ double-tilt mechanical testing transmission electron microscope holder

Construction of a novel in-situ measurement system combining SEM with a STM-TEM holder

Revisiting calculation of tilt angles for double‐tilt sample holders in transmission electron microscopes

A compact CCD-monitored atomic force microscope with optical vision and improved performances.

Electrical, Optical and Ionic Probe Inside Transmission Electron Microscope

A Method to Fabricate the Bifunctional Bent Optical Probes of AF/PSTM

B11-P-13 Thermally Actuated Tensile Deformation Device for TEM

Fabrication of a Simple and Easy Multidimensional Solid Sample Holder Accessory of Fluorescence

A handy method for high quality specimen preparation for chip-based in-situ transmission electron microscopy

An in-situ magnetising holder achieving 1.5 T in-plane field in 200 kV transmission electron microscope

A platform for in-situ multi-probe electronic measurements and modification of nanodevices inside a transmission electron microscope.

A simple coordinate transformation method for quickly locating the features of interest in TEM samples

Note: Low-Temperature Scanning Tunneling Microscope With Detachable Scanner And Reliable Transfer Mechanism For Tip And Sample Exchange

Preparation of ultrathin TEM sample by focused ion beam technique-the application of X2 sample holder