Transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering at low temperature

X. Bie,J. G. Lu,L. Gong,L. Lin,B. H. Zhao,Z. Z. Ye
DOI: https://doi.org/10.1016/j.apsusc.2009.08.018
IF: 6.7
2009-01-01
Applied Surface Science
Abstract:Ga-doped ZnO (ZnO:Ga) transparent conductive films were deposited on glass substrates by DC reactive magnetron sputtering. The structural, electrical, and optical properties of ZnO:Ga films were investigated in a wide temperature range from room temperature up to 400°C. The crystallinity and surface morphology of the films are strongly dependent on the growth temperatures, which in turn exert an influence on the electrical and optical properties of the ZnO:Ga films. The film deposited at 350°C exhibited the relatively well crystallinity and the lowest resistivity of 3.4×10−4Ωcm. More importantly, the low-resistance and high-transmittance ZnO:Ga films were also obtained at a low temperature of 150°C by changing the sputtering powers, having acceptable properties for application as transparent conductive electrodes in LCDs and solar cells.
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