Grown Parameters of Multiwalled Carbon Nanotube with Microwave Plasma Chemical Vapor Deposition

ZHANG Tie-jun,CHEN Ze-xiang
DOI: https://doi.org/10.3969/j.issn.1006-6268.2009.05.005
2009-01-01
Abstract:The article summarized the preparation,characters and the trend of development of carbon nanotube(CNT) .Experiments have done to studied the influence of technical parameters in microwave plasma chemical vapor deposition(MWPECVD) .The catalyst is playing a very important role in chemical vapor deposition(CVD) ,the article did some experiments with Fe and Ni catalyst for discovering the catalyst influence in carbon nanotube growth by scanning electron microscope(SEM) . Experimental data revealed that CNTs appearance are better with Fe catalyst than Ni catalyst in higher temperature. The deposition temperature also are important to CNT growth,a series of experiments under several different temperatures have been executed,and the results showed that the most appropriate temperature is about 600℃ in the article.
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