Preparation of carbon nanotubes and nano-particles by microwave plasma-enhanced chemical vapor deposition

Xizhang Wang,Zheng Hu,Xin Chen,Yi Chen
DOI: https://doi.org/10.1016/S1359-6462(01)00725-4
IF: 6.302
2001-01-01
Scripta Materialia
Abstract:Systematic preparation of carbon nanotubes (CNTs) and nanoparticles (CNPs) on Fe (or Co; Ni)/γ-Al2O3 by microwave plasma-enhanced chemical vapor deposition (MW-PECVD) has been reported with a mixture of CH4, H2, and Ar as precursors. By regulating the preparation parameters; Various carbon nanostructures including several novel CNTs have be obtained. The outstanding feature of this new approach is the low synthesis temperature (<520°C) due to the non-equilibrium characteristic of microwave plasma; Which is crucial for some practical applications. The experimental results also indicate the potentiality and feasibility for scaled-up production of CNTs and CNPs at low cost; And the posibility to control the morphologies and structures of the carbon products with MW-PECVD.
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