Heteroepitaxy of Cdte on Tilting Si(211) Substrates by Molecular Beam Epitaxy

YZ Wang,L Chen,Y Wu,J Wu,MF Yu,L He
DOI: https://doi.org/10.1016/j.jcrysgro.2006.01.048
IF: 1.8
2006-01-01
Journal of Crystal Growth
Abstract:CdTe(211)B epilayers were grown on 3in Si(211) substrates which misoriented 0–10° toward [111] by molecular beam epitaxy (MBE). The relationship of X-ray double-crystal rocking curve (XRDCRC) FWHM and deflection angle from CdTe(211) to Si(211) was studied. For 4.2–4.5μm CdTe, the best value of FWHM 83arcsec was achieved while deflection angle is 2.76°. A FWHM wafer mapping indicated a good crystalline uniformity of 7.4μm CdTe on tilting Si(211), with FWHM range of 60–72arcsec. The shear strains of these epilayers were analyzed, using reciprocal lattice points of symmetric and asymmetric reflections measured by high-resolution multi-crystal multi-reflection X-ray diffractometer (HRMCMRXD). It was found that the shear strain angle γ(011¯) of epilayer is effectively reduced by using proper tilting Si(211) substrate. It was also proved that the lattice parameter of CdTe(211)B is affected by the shear strain and thermal strain.
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