An approximate carrier-based compact model for fully depleted surrounding-gate MOSFETs with a finite doping body

Jin He,Feng Liu,Wei Bian,Jie Feng,Jian Zhang,Xing Zhang
DOI: https://doi.org/10.1088/0268-1242/22/6/015
IF: 2.048
2007-01-01
Semiconductor Science and Technology
Abstract:An approximate carrier-based compact model for surrounding-gate MOSFETs with a finite doping body is developed in this paper. Starting from Poisson's equation, the dopant effect is considered approximately by a superposition principle. The analytic surface potential is compared with 3D device simulation and the error is also demonstrated for different body doping. An analytic current - voltage model is derived from the Pao - Sah current equation under the gradual channel approximation and model predictions are verified by the 3D simulation results of the fully depleted SRG MOSFET devices for finite body doping concentration up to 10(17) cm(-3) with accepted error less 10%.
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