Study on Anti-EMI Metal Films by Magnetic Sputtering

DU Yuan-jia,DONG Shu-rong,SHAO Jing-yu
DOI: https://doi.org/10.3969/j.issn.1001-3660.2006.04.025
2006-01-01
Surface Technology
Abstract:Aimed at the clean solution of anti-EMI technology of plastic shell of electronic equipment,a method is presented,which is named as magnetic sputtering.The shielding efficiency and its shielding mechanism of different metals and its different structures are studied by electric and magnetic theory expressions.The technology parameter of sputtering is also studied.The result shows that the shielding metal films loss is the linear plus results of each film.The reflection is independent of position of each shielding film.The more layers or reflection between films,the more shielding efficiency can be obtained.The experiment results show that the optimal structure of shielding films is 500nm Cu+100nm 1Cr18Ni9Ti.
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