Growth of Electromagnetic Shielding Films Grown by Magnetron Sputtering on Plastic Substrates

Chen Shengqu,Wang Demiao,Zhao Huanchang,Su Da,Ren Gaochao
DOI: https://doi.org/10.13922/j.cnki.cjovst.2008.s1.019
2008-01-01
Abstract:A variety of multi-layered metallic coatings were deposited by magnetron sputtering,for the purpose of electromagnetic shielding(EM)of electronics device,on polyethylene terephthalate(PET)substrates.The coatings were characterized with scanning electron microscopy(SEM)and its EM shielding was evaluated with a lab-made microwave setup.The results show that the films work well.We suggest that the copper/stainless steel(Cu/1Cr18Ni9Ti)bi-layered coating works best in meeting the commercial requirements of EM shielding because of its good surface properties and high interfacial adhesion,500 kPa,and because of its effectiveness in EM shielding.For example,60db shielding can be obtained at a thickness of 764 nm and at a frequency of 2.5 GHz.Interesting finding is that when it comes to EM shielding,the coatings on both sides of PET substrate works better than the coatings of the same thickness.
What problem does this paper attempt to address?