On the electromagnetic shielding film deposited on surface of plastic by magnetron sputtering

Dong Shu-rong
IF: 4
2009-01-01
Vacuum
Abstract:Electromagnetic interference(EMI) becomes increasingly serious.Coating the electromagnetic shielding films is therefore the main measure to take to resist EMI, e.g., the shielding film was deposited on the surface of the plastic PET by magnetron sputtering to form a composite film of which the adhesion exceeded 5MPa with the shielding effect over 60dB in the range from 2 to 4GHz.Furthermore, the electromagnetic shielding characteristics of other shielding films are also studied, including electroconductive films, magnetically permeable films and relevant composite films.Testing data reveald that the power and film thickness affect the adhesion and shielding effectiveness to a certain extent and that the 300nm Cr18Ni9Ti + 500nm Cu composite shielding films can provide the optmal comprehensive shielding effect including film depositing rate and adhension.
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