Biomimetic antireflective Si nanopillar arrays.

Hongbo Xu,Nan Lu,Dianpeng Qi,Juanyuan Hao,Liguo Gao,Bo Zhang,Lifeng Chi
DOI: https://doi.org/10.1002/smll.200800282
IF: 13.3
2008-01-01
Small
Abstract:Biomimetic antireflective Si nanopillar arrays are created using self-assembled polymer-sphere monolayers as etching masks (see image). These tapered Si nanopillar arrays can greatly suppress the reflectivity of Si. This method provides a facile approach for producing antireflection (AR) surfaces on large areas with low cost and high throughput. Detailed facts of importance to specialist readers are published as ”Supporting Information”. Such documents are peer-reviewed, but not copy-edited or typeset. They are made available as submitted by the authors. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.
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