Abstract:As a safe, simple, environmental-friendly, and cost-effective growth technique of oxide materials, we have developed the mist chemical vapor deposition method. To grow ZnO, a water and/or alcohol solution of zinc-compounds (for example, zinc acetate) is used as the source, and micron-sized aerosol or mist particles formed by ultrasonic atomization are supplied to the reaction area with a carrier gas. The ZnO thin films grown on glass substrates exhibited c-axis orientation under the selected growth conditions. The transparency in the visible region was higher than 90 %, the room temperature photoluminescence showed near band edge emission without noticeable deep level emissions, and the surface root-mean-square roughness was 7.5 nm despite the polycrystalline structure. These results are satisfactory for optical applications. The minimum resistivity, however, by gallium doping was 1.1 x 10(-3) ohm cm, which needs further progress by enlarging the grain size. The growth of other oxide thin films, for example, MgO and CdO, as well as ZnO nanorods was reported, suggesting potential of wide applications of this growth technique to various oxide thin films and nanostructures with the friendliness to environment.

Density Controllable Growth of ZnO Quantum Dots by MOCVD

Growth and Microstructures of High Density Ge Quantum Dots on SiO_2 Layers

Znmgo Quantum Dots Grown by Low-Pressure Metal Organic Chemical Vapor Deposition

Optical studies of ZnO quantum dots grown on Si(0 0 1)

Optical studies of ZnO quantum dots grown on Si(001)

Mist CVD Growth of ZnO-Based Thin Films and Nanostructures

Controllable growth and characterization of ZnO/MgO quasi core-shell quantum dots

Low-temperature growth of uniform ZnO particles with controllable ellipsoidal morphologies and characteristic luminescence patterns.

The Effect of Growth Temperature on InAs Quantum Dots Grown by MOCVD

Position and density control in hydrothermal growth of ZnO nanorod arrays through pre-formed micro/nanodots.

Controllable growth and optical properties of ZnO nanostructures on Si nanowire arrays

Self-Assembled Zno Quantum Dots with Tunable Optical Properties

Asymmetrical quantum dot growth on tensile and compressive-strained ZnO nanowire surfaces

Zno Quantum Dots Synthesized by A Vapor Phase Transport Process

Cubic Mgxzn1-Xo Films Grown on Si(111)

The saturation density property of (B)InAs/GaAs quantum dots grown by metal-organic chemical vapor deposition

Thermal-desorption Induced Enhancement and Patterning of Ultraviolet Emission in Chemically Grown ZnO

MOCVD growth of self-arranged ZnO nanosize islands

Anodic-Aluminium-Oxide Template-Assisted Growth Of Zno Nanodots On Si (100) At Low Temperature

Controllable Growth of ZnO Microcrystals by a Capping-Molecule-Assisted Hydrothermal Process

Facile and Controllable Growth of ZnO 1D Nanostructure Arrays on Zn Substrate by Hydrothermal Process