Deposition And Microstructural Characterization Of Mgo Thin Films By A Spray Pyrolysis Method

Xie Yi,Wang Wenzhong,Qian Yitai,Yang Li,Chen Zhiwen
DOI: https://doi.org/10.1016/0257-8972(95)02762-9
1996-01-01
Abstract:Thin films of MgO (150 nm) were deposited by a spray pyrolysis method. Ethanol-water solutions of magnesium acetylacetonate were ultrasonically nebulized and thermally decomposed on to Si(111) and NACl(100) in the temperature range 400-450 degrees C. The microstructure of as-deposited MgO thin films was studied by X-ray diffraction, scanning electron microscopy and transmission electron microscopy.
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