Abstract:Piezoelectric accelerometers present higher sensitivities and better signal-to-noise ratios in comparison with piezoresistive and capacitive accelerometers. A micro-electromechanical system (MEMS) piezoelectric accelerometer was designed and manufactured with four L-shaped beams covered by Lead Zirconate Titanate (PZT) thin film with $1~\mu \text{m}$ in thickness which was deposited using sol-gel methods. The micro devices, whose size and the optimized PZT distribution were determined by theoretical and simulation analysis, were fabricated on the silicon substrate using PZT films working in the ${d}_{31}$ mode. Different from the conventional vertical crossbeam accelerometers, the designed structure devotes to the larger area piezoelectric film laid on L-shaped supporting beams with higher energy transferring efficiency for sensing. Then the chips of accelerometer were fabricated, and the proposed sensor was packaged on the printed circuit board (PCB). In addition, the microsphere was integrated in the center of the beams. Finally, the properties of the accelerometer were measured by vibration measurement system. The measuring results show that the initial sensitivity of the accelerometer is 28.14mV/g at 500Hz. The proposed piezoelectric accelerometer has high sensitivity and low resonance frequency, and the frequency response on each beam is consistent, providing a new structure for high-performance accelerometer.

High Sensitivity Cymbal-Based Accelerometer

Magnitude Versus Frequency Performance of Vibration Acceleration Sensor Based on Cymbal Transducer

Finite Element Analysis and Theoretical Model of Slotted Cymbal Composite Piezoelectric Transducer

CYMBAL PIEZOCOMPOSITES FOR VIBRATION ACCELEROMETER APPLICATIONS

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

A New-Style, Slotted-Cymbal Transducer with Large Displacement and High Energy Transmission

An Improved Cymbal Hydrophone Made of Lanthanum-Modified Lead Zirconate Titanite

Cymbal piezoelectric composite underwater acoustic transducer.

Design of a Piezoelectric Accelerometer with High Sensitivity and Low Transverse Effect

Research on Temperature Property of Piezoelectric Vibration Accelerometer Based on Cymbal Transducer

Research on Cymbal Piezoelectric Transducer Arrays

Non-linear Error Compensation of Voltage Sensitivity for Vibration Accelerometer Based on Cymbal Transducer

A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air

Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode

Energy Harvesting from Low-Frequency Vibration Using a Shear-Mode Rectangular Cymbal Transducer with a Piezoelectric Array

Piezoresistive Slot-Cantilever Type Accelerometer Inspired from Spider'S Slit Sensilla

High Sensitivity MEMS Accelerometer Using PZT-Based Four L-Shaped Beam Structure

Cymbal Transducer Array for Hydrophone Applications

Three-Beam-Seismic-Mass Structure Piezoresistive Accelerometer for High Performance Crash Test

Design, Fabrication, and Characterization of a High-Performance Monolithic Triaxial Piezoresistive High-g Accelerometer

Design and Fabrication of A High-Sensitive Capacitive Biaxial Microaccelerometer