A physiological sound sensing system using accelerometer based on flip-chip piezoelectric technology and asymmetrically gapped cantilever

Liu, Chaojun,Xu, Yong,Hu, Yating,Liu, Sheng

DOI: https://doi.org/10.1109/ECTC.2015.7159855

2015-01-01

Abstract:This paper focuses on the sensing of physiological sound on human body using accelerometers. The physiological sound sensing have demanding requirements on the sensitivity/noise performance of accelerometers since the physiological sounds are usually very weak. In this paper, a piezoelectric accelerometer based on the asymmetrically gapped cantilever structure, which exhibits significantly improved sensitivity, is presented. Furthermore, in order to reduce the package size of the accelerometer, a flip-chip piezoelectric technology is proposed. The accelerometer has a resonant frequency of 1580 Hz which is much higher than the heart sound frequency range, and a quality factor of 9.2. Using a coherent scaling method, the scaled noise level of the accelerometer between 10 Hz and 400 Hz is 1 µV/√Hz. Preliminarily test results show that the signal-to-noise ratio of the heart sound signal measured by the designed accelerometer is about four times higher than that by a high-end stethoscope.