Some aspects of tribological behaviour at the micro-scale—with particular reference to MEMS and MMAs

J.A. Williams,H.R. Le,w j a,l r

DOI: https://doi.org/10.1016/S0167-8922(05)80010-0

2005-01-01

Abstract:Micro-electro-mechanical systems, MEMS, is a rapidly growing interdisciplinary technology dealing with the design and manufacture of miniaturised machines or moving mechanical assemblies (MMAs) with major dimensions at the scale of tens, to perhaps hundreds, of microns. Because they depend on the cube of a representative dimension, component masses and inertias rapidly become small as size decreases whereas surface and tribological effects, which often depend on area, become increasingly important. Although our explanations of macroscopic tribological phenomena often involve individual events occurring at the small scale, when the overall component size is itself miniaturised it may be necessary to re-evaluate some conventional tribological paradigms. This review will look at some of the ways in which for a mechanical engineer small may well be different.