Unusual Stress Behaviour of CeO2-doped Diamond-Like Carbon Nanofilms

Z. Y. Zhang,X. C. Lu,J. B. Luo
DOI: https://doi.org/10.1080/09500830701771947
IF: 1.195
2008-01-01
Philosophical Magazine Letters
Abstract:CeO2-doped diamond-like carbon (DLC) films with thicknesses of 180–200 nm were deposited by unbalanced magnetron sputtering. When the CeO2 concentration is in the range 5–8%, the residual compressive stress of the deposited films is reduced by 90%, e.g. from about 4.1 GPa to 0.5 GPa, whereas their adhesion strength increases. These effects are attributed to the dissolution of CeO2 within the DLC amorphous matrix and a widening interface between the DLC film and the Si substrate, respectively.
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