Several measures for reducing the uncertainty of measurement on developing of the laser interferometer for gauge block measurement with double wavelengths

Jiang Xiulan,Zhu Yiqing,Ma Jianmin,Fu Yunxia,Cai Minggang,Ge Aiming,Wang Qing,Chen Lei
DOI: https://doi.org/10.3969/j.issn.1673-2235.2010.06.006
2010-01-01
Abstract:This paper summarizes several important measures for reducing the uncertainty of measurement in the process of developing the laser interferometer for gauge block measurement with double wavelengths.The interferometer achieves the measurement uncertainty of (0.02+0.2L)μm for measurement of central lengths of gauge blocks and has be successfully used to the automatic measurement of the high-grad gauge blocks.
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