Texture of Electroplated Copper Film under Biaxial Stress

Bo Hong,Chuan-hai Jiang,Xin-jian Wang
DOI: https://doi.org/10.2320/matertrans.47.2299
2006-01-01
MATERIALS TRANSACTIONS
Abstract:The stresses and the textures of electroplated copper films were studied using the X-ray diffraction analysis. The results show that the stresses in the films are always tensile. The films have (110) fiber texture at different thickness from 8 to 60 pm. From strain energy minimization point of view, the grains with (110) orientation should be favorable in these films. A further planar texture on top of the fiber texture was developed. It could be explained by elastic anisotropy at different orientation in grain.
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