Research on Preparation of TiO_2 Film by Sol-gel Process with Spin-coating Technology and Its Hydrophilic-Lipophilic Property

DAI Jianfeng,LI Yang,WANG Qing,LI Weixue,WU Zhongli
2008-01-01
Abstract:Nanometer scale TiO_2 films are prepared on glass substrates with film thickness less than 100nm by sol-gel process combining with spin-coating technology.The photoinduced hydrophilic-lipophilic property of TiO_2 film obtained is investigated by XRD and AFM with H_2O and C_6 H_6 as models.The parameters such as annealing tempera- ture,crystal size,film thickness affecting the hydrophilic-lipophilic property are systematically studied.The results show that the annealing temperature is the important factor strongly affecting the hydrophilic-lipophilic property.The best hydrophilie-lipophilic property is obtained when the annealing temperature is 550℃.In addition,it is found that the hydrophilic-lipophilic property is improved with the deereas of the crystal size and the increase of the film thickness, and it finally goes invariable when the film thickness is over 85nm.
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