Ion-irradiation-induced athermal annealing of helium bubbles in SiC

Wei Hua,Shu-De Yao,N. David Theodore,Xue-Mei Wang,Wei-Kan Chu,Michael Martin,Lin Shao
DOI: https://doi.org/10.1016/j.nimb.2010.04.004
2010-01-01
Abstract:We have compared the microstructural evolution of helium bubbles under ion irradiation and high temperature annealing. 4H–SiC was irradiated first by 140keV He ions to a fluence of 1.0×1017cm−2 and then annealed at 1200K for 30min. Then, the samples were either irradiated by 2MeV He ions to a fluence of 3.0×1016cm−2 at room temperature or annealed additionally at 1200K for 30min. Before and after 2MeV He ion irradiation, significant microstructural changes were observed, similar to effects of high temperature annealing. Thus, the study provides evidence of ion-irradiation-induced athermal annealing on defect Ostwald ripening process and bubble evolution. Possible mechanisms are discussed.
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