Photoemission study of a-Si:H/a-SiNx:H interface formation

L. Yang,B. Abeles,W. Eberhardt,D. Sondericker,H. Stasiewski,Z. Fu
DOI: https://doi.org/10.1016/0022-3093(87)90204-3
IF: 4.458
1987-01-01
Journal of Non-Crystalline Solids
Abstract:Core level spectra of the a-Si:H/a-SiN x :H heterojunctions show that interfaces are atomically abrupt and the valence band spectra indicate extra bonded hydrogen in the interface region. The Si L 2, 3 absorption edge of ultra thin a-SiN x :H layers exhibits an additional feature corresponding to transitions from SiN x core level to states in a-Si:H conduction band.
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