Characteristics of Krypton Chloride Excimer Lamps Driven by Sinusoidal ECG

ZHUANG Xiao-bo,ZHU Shao-long,ZHANG Shan-duan
DOI: https://doi.org/10.15943/j.cnki.fdxb-jns.2010.06.001
2010-01-01
Abstract:The spectrum,input power and 222nm radiation efficiency were measured for coaxial KrCl* excimer lamps based on the dielectric barrier discharge(DBD).The outer diameter(OD) of the inner tube of the lamp is 16mm with wall thickness of 2mm,while the OD of the outer tube is 40mm with wall thickness 1.2mm.The total pressure was 200hPa with chlorine 2hPa and krypton 198hPa.The lamps were driven by sinusoidal electronic control gear(ECG).The 222nm radiation power was derived from irradiance,according to the Keitz formula.The input electric power was measured with an oscilloscope,combined with a voltage probe and a current probe.The results show the maximum efficiency of 222nm radiation is 5.3% with frequency of 48.4kHz and input power of 150W.
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