INFLUENCE OF GAS ON THE EMISSION OF EXCIMER XeCl* EXCITED BY DIELECTRIC BARRIER DISCHARGE

徐金洲,梁荣庆,任兆杏,程黎放,童惠君
DOI: https://doi.org/10.3969/j.issn.0254-6086.2003.04.011
2003-01-01
Abstract:Influence of the gas parameters (gas ratio and pressure) on the excimer XeCl~ emission generated in dielectric barrier discharge (DBD) has been studied.The results show that a maximum radiation is achieved at suitable gas ratio and pressure under a constant input power level.The radiation shows great difference as the discharge mode changes from the filaments to a mode with the filaments scattered in glow-like background when the ratio of Cl_2/Xe varies in the range 1.5%~4%.At comparable conditions,this work shows that the radiation intensity generated in the gas mixture of He/Cl_2/Xe is less than that in Cl_2/Xe.
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