Influence of Power Supply on Excimer XeCl* Emission Excited by Dielectric Barrier Discharge

徐金洲,梁荣庆,任兆杏,程黎放,童惠君
DOI: https://doi.org/10.13922/j.cnki.cjovst.2002.05.006
2002-01-01
Abstract:The influence of power supply, such as voltage amplitude (Up-p-7kV), frequency (20-55)kHz and positive or negative voltage (the rise time -3μs), on the excimer XeCl* emission excited by dielectric barrier discharge have been experimentally studied. The results show that the UV intensity increases with the rise of voltage amplitude, but its energy conversion efficiency decreases. The higher frequency leading to the higher UV intensity is mainly due to the increased numbers of microdischarge, and partially due to the higher time variation of voltage during the rise period, which generates the higher reduced field. The asymmetry of discharge current in positive and negative voltage is also observed. The higher UV intensity excited by negative voltage is contributed to the higher energy fed into discharge, and it does not show in the emission spectra (250-650) nm any difference in the plasma chemical processes for producing excimer XeCl*.
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