Impacts of Driven Waveform on 222 nm Radiant Efficiency of KrCl Excilamp

Xiaobo Zhuang,Haojun Zhang,Shaolong Zhu,Shanduan Zhang
DOI: https://doi.org/10.3969/j.issn.1672-7126.2011.05.11
2011-01-01
Abstract:The 222 nm radiant efficiency of the coaxial KrC* excilamp was measured in a radiometric method. The lamp, with the diameters of the inner and outer tubes of 14, 16 mm and 37, 40 mm, respectively, and a pressure of 2×104 Pa, mixed with 102 Pa mbar of chlorine and 1.99×104 Pa of krypton, was driven by the sinusoidal and pulsed voltages generated with an electronic control gear (ECG). The radiant power was derived from the irradiation, on the basis of Keitz formula. The results show that the wave-shape of the driven voltage strongly affects the radiant efficiency of the excilamp. For example, the pulsed voltage results in a maximum efficiency of 11.4%, one time higher than that driven by a sinusoidal voltage.
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