Grayscale photomask fabricated by laser direct writing in metallic nano-films

Chuan Fei Guo,Sihai Cao,Peng Jiang,Ying Fang,Jianming Zhang,Yongtao Fan,Yongsheng Wang,Wendong Xu,Zhensheng Zhao,Qian Liu
DOI: https://doi.org/10.1364/OE.17.019981
IF: 3.8
2009-01-01
Optics Express
Abstract:The grayscale photomask plays a key role in grayscale lithography for creating 3D microstructures like micro-optical elements and MEMS structures, but how to fabricate grayscale masks in a cost-effective way is still a big challenge. Here we present novel low cost grayscale masks created in a two-step method by laser direct writing on Sn nano-films, which demonstrate continuous-tone gray levels depended on writing powers. The mechanism of the gray levels is due to the coexistence of the metal and the oxides formed in a laser-induced thermal process. The photomasks reveal good technical properties in fabricating 3D microstructures for practical applications. (C) 2009 Optical Society of America
What problem does this paper attempt to address?