The Friction Property of Hydrogenated Carbon with Fullerene Microstructure after Annealing

Qi Wang,Zhou Wang,Chengbing Wang,Junyan Zhang
DOI: https://doi.org/10.1007/978-3-642-03653-8_197
2009-01-01
Abstract:Hydrogenated amorphous carbon films were deposited on Si (100) substrates by dc-pulse plasma chemical vapor deposition. Structurally, the as-deposited carbon films could be considered as nanocomposite thin films with fullerene-like microstructure in diamond-like carbon matrix based on our previous result. Here, the evolution of the structure and tribological properties of hydrogenated carbon film with fullerene-like microstructure on the annealing in vacuum was investigated. The friction coefficient of fullerene-like hydrogenated carbon films in air with 40% relative humidity remained constant about 0.037 when annealed at 600 degrees C. And the wear rate of the films decreased sharply when annealed at 200 or 300 degrees C. Structural analysis shows that annealing to 200 and 300 degrees C improved tribological properties originated from the volume increase of the fullerene-like microstructure.
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