Microstructures and Mechanical Properties of TiCx Coatings Deposited by Arc Ion Plating

He Ma,Lin Zhang,Guojia Ma,Guoqiang Lin

DOI: https://doi.org/10.13922/j.cnki.cjovst.2015.05.19

2015-01-01

Abstract:CrAlN coatings can be widely used for the protection for the alloys of cutting tools or casting dies.However,the mechanical properties need to be further investigated.The CrAlN coatings were deposited by arc ion plating(AIP) technique.The coating microstructures were analyzed by scanning electron microscope(SEM) and X-ray diffraction(XRD).The microhardness and adhesive strength of the coatings on the substrate were measured.The results indicated that there are CrN and CrAlN phases in the CrAlN coatings.The microstructures of the CrAlN coatings are related to the substrate bias voltage and the N2/Ar gas flow ratios during AIP deposition.Increasing the substrate bias voltage and the N2/Ar gas flow ratios,the CrAlN coatings became compact and the number of surface macroparticles decreased.The Al contents and the microhardness of the coatings increased with the augmented N2/Ar gas flow ratios.The maximum value of interfacial adhesive strength was 65 N.